Gas Delivery Module: Compatible with multiple brands of MFCs. Precise control of resistance, flow rate, and pressure allows flexible adaptation to various process requirements.
Material Delivery Module: Offers a flexible selection of plunger and syringe pumps. Customize material, flow rate, pressure, and other parameters to meet complex material delivery needs.
Reactor Module: Customizable with 316L/C276 metal, quartz, and photothermal reactors to accommodate diverse process scenarios.
Gas-Liquid Separation Module: Precisely separates gases and liquids to ensure process purity. Separation efficiency can be customized.
Accessory Module: Expandable with automated sampling and monitoring units for enhanced automation and data accuracy.
Software System: Customized control and data analysis enable intelligent management of the entire process.